ABCM Symposium Series in Mechatronics

Vol. 2

Section VII - NANO & MEMS

VII.01:		DESIGN OF ELECTROTHERMOMECHANICAL MEMS Wilfredo Montealegre Rubio, Paulo Henrique de Godoy, Emílio Carlos Nelli Silva		pp.469-476
VII.02:		NUMERICAL ANALYSIS AND EXPERIMENTAL STUDY BY MICRO LASER DOPPLER VIBROMETER FOR THE DYNAMIC CHARACTERIZATION OF RF MEMS SWITCHES Enrico P. Tomasini, Barbara Marchetti		pp.477-484
VII.03:		DESIGN OF HIGH PRECISION POSITIONING AND MEASURING MACHINES USING VIRTUAL PROTOTYPING Günter Höhne, Torsten Brix, Markus Lotz, René Theska, Thomas Frank, Thomas Hackel		pp.485-492
VII.04:		UNIDIMENSIONAL MODELING AND CONSTRUCTION OF A 1-3 PIEZOELECTRIC COMPOSITE TRANSDUCER Marco Aurélio Brizzotti Andrade, Flávio Buiochi, Julio Cezar Adamowski		pp.493-500
VII.05:		MEMS SENSOR APPLICATION FOR THE MOTION ANALYSIS IN SPORTS SCIENCE Yuji OHGI		pp.501-508
VII.06:		OUT-OF-PLANE MOTION MICROACTUATORS MADE OF THIN FILM METALLIC GLASS Seiichi Hata, Takashi Fukushige, Takehiko Hayashi, Hiroyuki Tachikawa, Akira Shimokohbe		pp.509-516
VII.07:		ASPECTS OF FABRICATION AND CHARACTERIZATION OF ELECTRO-THERMAL MICRO ACTUATORS Paulo Henrique de Godoy, Emílio Carlos Nelli Silva		pp.517-524
VII.08:		DEVELOPMENT OF AN ELECTROTHERMOMECHANICAL XY MICROPOSITIONER Wagner Shin Nishitani, Flávio Honda, Paulo Henrique de Godoy, Emílio Carlos Nelli Silva		pp.525-532
VII.09:		A STUDY ON A PROGRESSIVE WAVE TYPE NOVEL PIEZOELECTRIC PUMP Nobuhiko Henmi, Rei Ohyama, Michihiko Tanaka, Akimasa Suda, Fumiaki Karasawa, Masahiko Ichikawa, Kiyoshi Ohshima, Naoki Miyahara		pp.533-538
VII.10:		CONVERGENCE AND DISCRETIZATION CHARACTERISTICS OF A STAGGERED ALGORITHM FOR MICROELECTROMECHANICAL SYSTEMS SIMULATION Cornelis Joannes van der Poel Filho, Renato Pavanello, Antonio Gugliotta, Aurelio Somà		pp.539-546

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